| Two-dimensional fluid model simulation of bell jar top inductively coupled plasma |
| Wu HM(吴汉明); Yu BW; Li M ; Yang Y; Wu, HM (reprint author), CFD RES CORP,HUNTSVILLE,AL 35805, USA.
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| Source Publication | IEEE Transactions on Plasma Science
(IF:1.325[JCR-2018],1.158[5-Year]) |
| 1997
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| Volume | 25Issue:1Pages:1-6 |
| ISSN | 0093-3813
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| Abstract | In the present paper, argon (Ar) plasmas in a bell jar inductively coupled plasma (ICP) source are systematically studied over pressures from 5 to 20 mtorr and power inputs from 0.2 to 0.5 kW. In this study, both a two-dimensional (2-D) fluid model simulation and global model calculation are compared, The 2-D fluid model simulation with a self-consistent power deposition is developed to describe the Ar plasma behavior as well as predict the plasma parameter distributions, Finally, a quantitative comparison between the global model and the fluid model is made to test their validity. |
| Keyword | Inductively Coupled Plasma
Simulation
Discharge
Density
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| Indexed By | SCI
|
| Language | 英语
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| WOS ID | WOS:A1997WL61100001
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| WOS Keyword | DISCHARGE
; DENSITY
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| WOS Research Area | Physics
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| WOS Subject | Physics, Fluids & Plasmas
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| Citation statistics |
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| Document Type | 期刊论文
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| Identifier | http://dspace.imech.ac.cn/handle/311007/39064
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| Collection | 力学所知识产出(1956-2008)
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| Corresponding Author | Wu, HM (reprint author), CFD RES CORP,HUNTSVILLE,AL 35805, USA. |
Recommended Citation
GB/T 7714 |
Wu HM,Yu BW,Li M,et al. Two-dimensional fluid model simulation of bell jar top inductively coupled plasma[J]. IEEE Transactions on Plasma Science,1997,25,1,:1-6.
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| APA |
吴汉明,Yu BW,Li M,Yang Y,&Wu, HM .(1997).Two-dimensional fluid model simulation of bell jar top inductively coupled plasma.IEEE Transactions on Plasma Science,25(1),1-6.
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| MLA |
吴汉明,et al."Two-dimensional fluid model simulation of bell jar top inductively coupled plasma".IEEE Transactions on Plasma Science 25.1(1997):1-6.
|
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