Knowledge Management System of Institue of Mechanics, CAS
| Two-dimensional fluid model simulation of bell jar top inductively coupled plasma | |
Wu HM(吴汉明); Yu BW; Li M ; Yang Y; Wu, HM (reprint author), CFD RES CORP,HUNTSVILLE,AL 35805, USA.
| |
| Source Publication | IEEE Transactions on Plasma Science
 |
| 1997 | |
| Volume | 25Issue:1Pages:1-6 |
| ISSN | 0093-3813 |
| Abstract | In the present paper, argon (Ar) plasmas in a bell jar inductively coupled plasma (ICP) source are systematically studied over pressures from 5 to 20 mtorr and power inputs from 0.2 to 0.5 kW. In this study, both a two-dimensional (2-D) fluid model simulation and global model calculation are compared, The 2-D fluid model simulation with a self-consistent power deposition is developed to describe the Ar plasma behavior as well as predict the plasma parameter distributions, Finally, a quantitative comparison between the global model and the fluid model is made to test their validity. |
| Keyword | Inductively Coupled Plasma Simulation Discharge Density |
| Indexed By | SCI |
| Language | 英语 |
| WOS ID | WOS:A1997WL61100001 |
| WOS Keyword | DISCHARGE ; DENSITY |
| WOS Research Area | Physics |
| WOS Subject | Physics, Fluids & Plasmas |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://dspace.imech.ac.cn/handle/311007/39064 |
| Collection | 力学所知识产出(1956-2008) |
| Corresponding Author | Wu, HM (reprint author), CFD RES CORP,HUNTSVILLE,AL 35805, USA. |
| Recommended Citation GB/T 7714 | Wu HM,Yu BW,Li M,et al. Two-dimensional fluid model simulation of bell jar top inductively coupled plasma[J]. IEEE Transactions on Plasma Science,1997,25,1,:1-6. |
| APA | 吴汉明,Yu BW,Li M,Yang Y,&Wu, HM .(1997).Two-dimensional fluid model simulation of bell jar top inductively coupled plasma.IEEE Transactions on Plasma Science,25(1),1-6. |
| MLA | 吴汉明,et al."Two-dimensional fluid model simulation of bell jar top inductively coupled plasma".IEEE Transactions on Plasma Science 25.1(1997):1-6. |
| Files in This Item: | Download All | |||||
| File Name/Size | DocType | Version | Access | License | ||
| A048.pdf（390KB） | 开放获取 | -- | View Download | |||
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment