大流量压阻式流量传感器的研制

IMECH-IR > 力学所知识产出(1956-2008)

	大流量压阻式流量传感器的研制
	王小保; 钱劲; 张大成
Source Publication	微纳电子技术
	2003-08-25
Issue	Z1 Pages:449-451
Abstract	根据流体力学差压原理 ,采用硅微机械加工手段设计制作了微挡板结构的压阻式流量传感器。测试结果表明 ,该传感器具有测量 0 .1～ 10L/min的气体流量的能力
Keyword	差压流量传感器微机械加工压敏电阻
Language	中文
Document Type	期刊论文
Identifier	http://dspace.imech.ac.cn/handle/311007/40280
Collection	力学所知识产出(1956-2008)
Corresponding Author	王小保
Recommended Citation GB/T 7714	王小保,钱劲,张大成. 大流量压阻式流量传感器的研制[J]. 微纳电子技术,2003,Z1,:449-451.
APA	王小保,钱劲,&张大成.(2003).大流量压阻式流量传感器的研制.微纳电子技术(Z1),449-451.
MLA	王小保,et al."大流量压阻式流量传感器的研制".微纳电子技术 .Z1(2003):449-451.

Related Services

Bookmark

Lanfanshu

Similar articles in Bing Scholar

Terms of Use

No data!

Social Bookmark/Share

File name:	144.pdf
Format:	Adobe PDF

This file does not support browsing at this time

All comments (0)

No comment.

The comment function is only available to registered usersLog In

If you have any objections to this item, please fill out the form below and the administrator will contact you as soon as possible.
Content:
Email：	*
Institution:
Verification Code:	Refresh

Any comments and suggestions are welcomed.
Title:	*
Content:
Email：	*
Verification Code:	Refresh

中国科学院力学研究所机构知识库