微桥结构镍膜的弹性模量和残余应力研究

IMECH-IR > 力学所知识产出(1956-2008)

	微桥结构镍膜的弹性模量和残余应力研究
	陈吉安; 杨春生; 周勇; 丁桂甫; 王莉; 王明军; 张亚民; 张泰华
Source Publication	微细加工技术
	2003-09-30
Issue	3 Pages:66-71
Abstract	采用MEMS(MicroelectromechanicalSystems)技术研制了宽度在微米尺度的镍(Ni)膜微桥结构试样。采用纳米压痕仪(Nanoindenter)XP系统的楔形压头测量了微桥载荷与位移的关系,并结合微桥力学理论模型得到了Ni膜的弹性模量及残余应力,分别为190GPa和87MPa。与采用纳米压痕仪直接测得的带有硅(Si)基底的Ni膜弹性模量(186.8±7.5)GPa相符合。
Keyword	Ni膜微桥 Meme技术力学特性
Language	中文
Funding Organization	国家重点基础研究发展规划(973)资助项目(G1999033103)
Document Type	期刊论文
Identifier	http://dspace.imech.ac.cn/handle/311007/42230
Collection	力学所知识产出(1956-2008)
Corresponding Author	陈吉安
Recommended Citation GB/T 7714	陈吉安,杨春生,周勇,等. 微桥结构镍膜的弹性模量和残余应力研究[J]. 微细加工技术,2003,3,:66-71.
APA	陈吉安.,杨春生.,周勇.,丁桂甫.,王莉.,...&张泰华.(2003).微桥结构镍膜的弹性模量和残余应力研究.微细加工技术(3),66-71.
MLA	陈吉安,et al."微桥结构镍膜的弹性模量和残余应力研究".微细加工技术 .3(2003):66-71.

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