| Determining the adsorption-induced surface stress and mass by measuring the shift of resonant frequencies | |
Zhang Y(张吟) ; Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech LNM, Beijing 100190, Peoples R China.
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| Source Publication | Sensors and Actuators A-Physical
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| 2013-05-01 | |
| Volume | 194Pages:169-175 |
| ISSN | 0924-4247 |
| Abstract | The adsorption-induced surface stress and mass can cause the resonant frequency shifts of a microcantilever, which is used as the sensing mechanism for a resonator sensor. Determining the adsorption-induced surface stress and mass from the experimentally measured data of resonant frequencies forms an inverse problem. Because there are infinite combinations of surface stress and mass which can result in the same change of one resonant frequency, the previous studies usually measure surface stress or mass by one measurement method and then find the other by another different measurement method. This study shows that surface stress and mass have different impacts on the resonant frequencies of a microcantilever. Two resonant frequencies are used to uniquely determine the adsorption-induced surface stress and mass. Mathematically, the new method presented in this study provides an efficient and straightforward solution to the inverse problem and its accuracy is also demonstrated. Physically, the new method only requires the dynamic mode to measure the resonant frequencies, which should be of a great help to various sensor applications. |
| Keyword | Surface Stress Resonant Frequencies Adsorption Resonator Sensor |
| Subject Area | 微机电系统中的固体力学问题 |
| DOI | 10.1016/j.sna.2013.01.029 |
| URL | 查看原文 |
| Indexed By | SCI ; EI |
| Language | 英语 |
| WOS ID | WOS:000319306800021 |
| Funding Organization | National Natural Science Foundation of China (NSFC) [110212622, 11023001]; Chinese Academy of Sciences [KJCX2-EW-L03] |
| Department | LNM纳/微系统力学与物理力学 |
| Classification | 二类/Q1 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://dspace.imech.ac.cn/handle/311007/47322 |
| Collection | 非线性力学国家重点实验室 |
| Corresponding Author | Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech LNM, Beijing 100190, Peoples R China. |
| Recommended Citation GB/T 7714 | Zhang Y,Zhang, Y . Determining the adsorption-induced surface stress and mass by measuring the shift of resonant frequencies[J]. Sensors and Actuators A-Physical,2013,194:169-175. |
| APA | Zhang Y,&Zhang, Y .(2013).Determining the adsorption-induced surface stress and mass by measuring the shift of resonant frequencies.Sensors and Actuators A-Physical,194,169-175. |
| MLA | Zhang Y,et al."Determining the adsorption-induced surface stress and mass by measuring the shift of resonant frequencies".Sensors and Actuators A-Physical 194(2013):169-175. |
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