IMECH-IR  > 高温气体动力学国家重点实验室
GEC-CCP 发生器内等离子体流动的数值分析
杨弼杰; 周宁; 孙泉华
Source Publication高温气体动力学研究进展
2012
Pages248-254
Conference NameLHD2012夏季学术研讨会
Conference Date2012
Conference Place吉林延吉
Abstract本文对GEC-CCP 发生器内氩气的流动和放电过程进行了数值模拟。计算采用流体模型,考虑了热非平衡和化学非平衡过程,强调了流动对气体放电过程的影响,并与实验结果进行了对比。研究表明,该模型能较好地描述等离子体实际流动和放电过程。此外,合理的物性参数和化学反应机理是正确模拟非平衡等离子体流动的基础,特别是物理化学模型对电子数密度的数值及分布的预测有较大的影响。
Keyword低温等离子体 非平衡流动 Cfd 模型 氩气放电
DepartmentLHD微尺度和非平衡流动
Language中文
Document Type会议论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/48008
Collection高温气体动力学国家重点实验室
Recommended Citation
GB/T 7714
杨弼杰,周宁,孙泉华. GEC-CCP 发生器内等离子体流动的数值分析[C]高温气体动力学研究进展,2012:248-254.
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