IMECH-IR  > 非线性力学国家重点实验室
The ultra-high sensitivity of mass resonator achieved by the beam with variable thickness
Wei CX(卫晨曦); Zhang Y(张吟)
Source PublicationRESULTS IN PHYSICS
2023-07
Volume49Pages:106483
ISSN2211-3797
AbstractThe shift of resonant frequency due to the particle adsorption is the mass sensing mechanism of a micro/nano-resonator. The sensitivity and resolution are the two key performance indicators of a mass resonator. An effective method to significantly enhance the sensitivity of a mass resonator is presented. The method is realized by the design of the beam resonator thickness variation along the longitudinal direction. The analytical expression of the non-uniform resonator sensitivity and the optimization process on the thickness are given. The optimal shapes of the cantilevered and doubly clamped beam resonators are obtained by the optimization process. The sensitivities of the beam resonators in the optimal shapes are three orders of magnitude higher than those of the uniform ones. A systematic method of enhancing the sensitivity of a mass resonator through the shape optimi-zation is thus provided. The influences of the axial load on the optimization results are also discussed.
KeywordMass resonator Sensitivity Shape optimization Resonant frequency Beam Variable thickness
DOI10.1016/j.rinp.2023.106483
Indexed BySCI
Language英语
WOS IDWOS:000988956000001
Funding OrganizationNational Natural Science Foundation of China [11772335] ; Ministry of Science and Tech- nology of China [2022YFE0124700]
Classification二类
Ranking1
ContributorZhang, Y
Citation statistics
Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/92280
Collection非线性力学国家重点实验室
Affiliation1.(Wei Chenxi, Zhang Yin) Chinese Acad Sci Inst Mech State Key Lab Nonlinear Mech LNM Beijing 100190 Peoples R China
2.(Wei Chenxi, Zhang Yin) Univ Chinese Acad Sci Sch Engn Sci Beijing 100049 Peoples R China
Recommended Citation
GB/T 7714
Wei CX,Zhang Y. The ultra-high sensitivity of mass resonator achieved by the beam with variable thickness[J]. RESULTS IN PHYSICS,2023,49:106483.Rp_Au:Zhang, Y
APA 卫晨曦,&张吟.(2023).The ultra-high sensitivity of mass resonator achieved by the beam with variable thickness.RESULTS IN PHYSICS,49,106483.
MLA 卫晨曦,et al."The ultra-high sensitivity of mass resonator achieved by the beam with variable thickness".RESULTS IN PHYSICS 49(2023):106483.
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