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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [2]
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Boulos MI [2]
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Zhao GY [2]
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1990 [2]
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The induction plasma chemical reactor: Part II. Kinetic model
期刊论文
Plasma Chemistry and Plasma Processing, 1990, 卷号: 10, 期号: 1, 页码: 151-166
Authors:
Zhao GY
;
Mostaghimi J
;
Boulos MI
Adobe PDF(484Kb)
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View/Download：964/259
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Submit date：2009/08/03
Induction Plasma - Modeling - Chemical Kinetics - Dissociation Of Silicon Tetrachloride
The induction plasma chemical reactor: Part I. Equilibrium model
期刊论文
Plasma Chemistry and Plasma Processing, 1990, 卷号: 10, 期号: 1, 页码: 133-150
Authors:
Zhao GY
;
Mostaghimi J
;
Boulos MI
Adobe PDF(570Kb)
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View/Download：657/217
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Submit date：2009/08/03
Induction Plasma - Modeling - Chemical Equilibrium - Silicon Nitride Synthesis
