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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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微重力重点实验室 [1]
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Jin, G [1]
Wang HQ [1]
Wang WY [1]
Yu ZN [1]
刘河山 [1]
李玉琼 [1]
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2012 [1]
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Effect of ion-beam assisted deposition on the film stresses of TiO2 and SiO2 and stress control
期刊论文
ACTA MECHANICA SINICA, 2012, 卷号: 28, 期号: 5, 页码: 1382-1388
Authors:
Li YQ(李玉琼)
;
Wang HQ
;
Wang WY
;
Yu ZN
;
Liu HS(刘河山)
;
Jin G(靳刚)
;
Jin, G
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Submit date：2013/01/18
Film Stress
Stress Controlling
Ion-beam Assisted Deposition
Hartmann-shack Sensor
Thin-films
Residual-stress
