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Effect of ion-beam assisted deposition on the film stresses of TiO2 and SiO2 and stress control 期刊论文
ACTA MECHANICA SINICA, 2012, 卷号: 28, 期号: 5, 页码: 1382-1388
Authors:  Li YQ(李玉琼);  Wang HQ;  Wang WY;  Yu ZN;  Liu HS(刘河山);  Jin G(靳刚);  Jin, G
View  |  Adobe PDF(594Kb)  |  Favorite  |  View/Download：867/270  |  Submit date：2013/01/18
Film Stress  Stress Controlling  Ion-beam Assisted Deposition  Hartmann-shack Sensor  Thin-films  Residual-stress  
Dielectric properties and resistance to fatigue failure of different barrier layers prepared on flexible stainless-steel foils by ion-beam assisted deposition 期刊论文
THIN SOLID FILMS, 2012, 卷号: 520, 期号: 21, 页码: 6556-6560
Authors:  Li YQ(李玉琼);  Yu ZN;  Leng J;  Wang HQ;  Chen S(陈涉);  Dong YH(董玉辉);  Jin G(靳刚);  Yu, ZN;  Beijing Inst Technol, Sch Optoelect, Beijing 100081, Peoples R China.
Adobe PDF(1005Kb)  |  Favorite  |  View/Download：980/267  |  Submit date：2013/01/18
Barrier Layer  Composite Barrier  Dielectric Properties  Fatigue Testing  Stainless-steel Foil  Ion Beam Assisted depositIon  Metal Oxides  Film Solar-cells  Thin-films  Efficiency  Tio2