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Fast deposition of diamond-like carbon films by radio frequency hollow cathode method
期刊论文
THIN SOLID FILMS, 2013, 卷号: 534, 页码: 226-230
Authors:
Pang XL
;
Peng HL
;
Yang HS
;
Gao KW
;
Wu XL(武晓雷)
;
Volinsky AA
;
Yang, HS (reprint author), Univ Sci & Technol Beijing, Dept Mat Phys & Chem, Beijing 100083, Peoples R China.
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Submit date：2013/05/31
Diamond-like Carbon Films
Hollow Cathode
Deposition Rate
Raman Spectra
Nanohardness
