IMECH-IR

浏览/检索结果: 共2条,第1-2条 帮助

已选(0)清除 条数/页:   排序方式:
Deflections and curvatures of a film-substrate structure with the presence of gradient stress in MEMS applications 期刊论文
Journal of Micromechanics and Microengineering, 2007, 卷号: 17, 期号: 4, 页码: 753-762
作者:  Zhang Y(张吟);  Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, LNM, Beijing 100080, Peoples R China.
Adobe PDF(594Kb)  |  收藏  |  浏览/下载:791/193  |  提交时间:2009/08/03
Thin-films  Micromachined Beams  Residual-stress  Cantilever Beam  Stoney Formula  Surface Stress  Strain  Bilayer  Systems  Model  
Effect of compliant interface on the curvature and stress of micron-size film-substrate composite structure 会议论文
2006 IEEE International Conference on Robotics and Biomimetics, ROBIO 2006, Kunming, China, December 17, 2006 - December 20, 2006
作者:  Liu Y;  Zhang Y(张吟)
浏览  |  Adobe PDF(4554Kb)  |  收藏  |  浏览/下载:237/99  |  提交时间:2017/06/01
(ABiotic And Biotic) Stress  Curvature (Sori)  Error Sources  General (Co)  Interface Layers  Interfacial Slips  International Conferences  Micron Sizes  Stoney's Formula  Stress States  Stress Transfer