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Cz法大型砷化镓单晶生长中熔体流动和传热
Alternative TitleFlow and Heat Transfer within the Melt in Czochralski Growth of Large GaAs Single Crystal
陈淑仙; 李明伟; 胡文瑞; 曾丹苓
Source Publication重庆大学学报. 自然科学版
2003-09-30
Volume26Issue:9Pages:96-100
ISSN1000-582X
Abstract采用低雷诺数k-ε模型,计算分析了Cz法大型砷化镓单晶生长中熔体 内的热量、动量输支特性。结果表明:适当的坩埚旋转能有效抑制晶体旋转产生的对流和浮力对流,增长晶体转速能使晶体/熔体界面附近等温线更加平直,适当的坩埚、晶体转速匹配能够抑止晶体/熔体界面附近的温度波动,热毛细力对强烈熔体流动的影响可以忽略不计,但对较弱的熔体流动影响较大。文中还给出了较为适宜的坩埚、晶体转速匹配方式。研究结果为生长高质量大型砷化镓单晶提供了有重要价值的数值依据。
KeywordCzochralski法 大型砷化镓 紊流
Indexed ByCSCD
Language中文
CSCD IDCSCD:1234427
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Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/40032
Collection力学所知识产出(1956-2008)
Corresponding Author陈淑仙
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GB/T 7714
陈淑仙,李明伟,胡文瑞,等. Cz法大型砷化镓单晶生长中熔体流动和传热[J]. 重庆大学学报. 自然科学版,2003,26,9,:96-100.
APA 陈淑仙,李明伟,胡文瑞,&曾丹苓.(2003).Cz法大型砷化镓单晶生长中熔体流动和传热.重庆大学学报. 自然科学版,26(9),96-100.
MLA 陈淑仙,et al."Cz法大型砷化镓单晶生长中熔体流动和传热".重庆大学学报. 自然科学版 26.9(2003):96-100.
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