Determining both adhesion energy and residual stress by measuring the stiction shape of a microbeam

doi:10.1007/s00542-014-2127-6

IMECH-IR > 非线性力学国家重点实验室

	Determining both adhesion energy and residual stress by measuring the stiction shape of a microbeam
	Zhang Y(张吟); Zhao YP(赵亚溥); Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech LNM, Beijing 100190, Peoples R China.
发表期刊	MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
	2015-04
卷号	21 期号:4 页码:919-929
ISSN	0946-7076
摘要	The competition between the adhesive force and the beam restoring force determines the stiction shape of a microbeam. The presence of residual stress changes the beam stiffness and thus leads to the change of the beam restoring force. This study presents a model of incorporating the residual stress effect for the beam stiction. The previous models of arc-shape and S-shape correspond to the zero residual stress case, which also prescribes the stiction shape. When the residual stress becomes large, arc-shape and S-shape significantly deviate from the actual stiction shape of a slender beam. With the assumed stiction shape of arc-shape and S-shape, suspension length is the only parameter needed to characterize the stiction shape and suspension length can also be used to uniquely determine the adhesion energy. However, there are infinite combinations of residual stress and adhesion energy which can result in the same suspension length. Besides suspension length, the beam rise above the substrate can also be used as a parameter to characterize the stiction shape. This study presents a method of using these two parameters to uniquely determine the residual stress and adhesion energy as an inverse problem. A computation technique of using the stiction shape symmetry to significantly reduce the computation is also demonstrated.
学科领域	Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
DOI	10.1007/s00542-014-2127-6
URL	查看原文
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000351279200023
关键词[WOS]	MICROELECTROMECHANICAL SYSTEMS ; CONTACT ; CANTILEVER ; BEAM ; MEMS ; MECHANICS ; MODEL ; FILM ; MICROCANTILEVERS ; FOUNDATION
WOS研究方向	Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics
WOS类目	Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
项目资助者	National Natural Science Foundation of China (NSFC) [11023001, 11372321]
课题组名称	LNM纳/微系统力学与物理力学
论文分区	Q3
引用统计	被引频次：9[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/49904
专题	非线性力学国家重点实验室
通讯作者	Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech LNM, Beijing 100190, Peoples R China.
推荐引用方式 GB/T 7714	Zhang Y,Zhao YP,Zhang, Y . Determining both adhesion energy and residual stress by measuring the stiction shape of a microbeam[J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2015,21,4,:919-929.
APA	张吟,赵亚溥,&Zhang, Y .(2015).Determining both adhesion energy and residual stress by measuring the stiction shape of a microbeam.MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,21(4),919-929.
MLA	张吟,et al."Determining both adhesion energy and residual stress by measuring the stiction shape of a microbeam".MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 21.4(2015):919-929.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
IMCAS-J2015-054.pdf（568KB）			开放获取	CC BY-NC	浏览下载