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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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Adhesion-Induced Failure of the Slender MEMS Structures
会议论文
International Conference on Mechanical Design Manufacture and Automation Engineering, Phuket THAILAND, JAN 11-12 2014
Authors:
Liu Y
;
Zhang Y(张吟)
;
[email protected]
;
[email protected]
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View/Download:314/0
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Submit date:2015/09/29
Adhesion
Stiction
S-shape
Arc-shape
Flexural contact in MEMS stiction
期刊论文
INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 2012, 卷号: 49, 期号: 17, 页码: 2203-2214
Authors:
Zhang, Yin
;
Zhao, Ya-pu
;
Zhang, Y
;
Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China.
Adobe PDF(673Kb)
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View/Download:1057/220
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Submit date:2013/01/18
Stiction
Contact Mechanics
Mems
Adhesion
Arc-shape
S-shape
Contact Mechanics in Flexural MEMS Stiction
会议论文
第十二届全国物理力学学术会议, 中国广西桂林, 2012/11/12
Authors:
Zhang Y(张吟)
;
Zhao YP(赵亚溥)
Adobe PDF(453Kb)
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View/Download:558/234
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Submit date:2014/01/27
Stiction
Adhesion
Microcantilever
Interface
Stiction of flexural MEMS structures
会议论文
3rd International Conference on Digital Manufacturing and Automation, ICDMA 2012, Guangxi, China, AUG 01-02, 2012
Authors:
Liu Y
;
Zhang Y(张吟)
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Adobe PDF(307Kb)
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View/Download:774/246
  |  
Submit date:2013/02/26
Adhesion
Boundary Conditions
Composite Micromechanics
Manufacture
Stiction
Variational Techniques
Beam Bending
Beam Deflection
Beam Length
Constraint Conditions
Contact Areas
Contact Separation
Elastic Energy
External Loads
Matching Condition
Mems-structure
Micro-cantilevers
Microcantilever Beams
Principle Of Virtual Work
Rayleigh-ritz Methods
s Shape
S-shaped
Significant Impacts
Variational Methods
A precise model for the shape of an adhered microcantilever
期刊论文
Sensors and Actuators A-Physical, 2011, 卷号: 171, 期号: 2, 页码: 381-390
Authors:
Zhang Y(张吟)
;
Zhao YP(赵亚溥)
;
Zhang, Y (reprint author), Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China
Adobe PDF(672Kb)
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View/Download:1031/281
  |  
Submit date:2012/04/01
Stiction
Microcantilever
Adhesion
Arc-shape
S-shape
Finite Beam
Adhesion
Stiction
Mems
Contact
Force
Cantilevers
Foundation
Mechanics
Work
Casimir Effect on the Pull-in Parameters of Nanometer Switches
期刊论文
Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems, 2005, 卷号: 11, 期号: 2-3, 页码: 80-85
Authors:
Lin WH(林文惠)
;
Zhao YP(赵亚溥)
;
Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech LNM, Beijing 100080, Peoples R China.
Adobe PDF(284Kb)
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View/Download:654/201
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Submit date:2007/06/15
Microelectromechanical Systems
Elastic Films
Mems
Force
Actuators
Stability
Stiction
Adhesion
Model